Hollow XY Wafer Inspection Platform

Hollow XY Design XY Stroke: 288mm * 288mm XY Cross-over Structure, with built-in linear motors and high-precision crossed roller guide rails XY Integrated with high-precision grating scales, repeat positioning accuracy ±0.5um, absolute positioning accuracy 2um

• Hollow XY Design

• XY Stroke: 288mm * 288mm

• XY Cross-over Structure, with built-in linear motors and high-precision crossed roller guide rails

• XY Integrated with high-precision grating scales, repeat positioning accuracy ±0.5um, absolute positioning accuracy 2um

• Typical Application Areas: 4/6/8-inch wafer inspection